MEMS Siab Sensor

1. MEMS siab sensor yog dab tsi

Lub siab sensor yog cov cuab yeej siv feem ntau siv hauv kev lag luam, feem ntau yog tsim los ntawm cov ntsiab lus siab rhiab (elastic rhiab ntsiab lus, hloov pauv cov ntsiab lus rhiab) thiab cov teeb liab ua haujlwm, cov ntsiab lus ua haujlwm feem ntau yog raws li kev hloov pauv ntawm cov ntaub ntawv siab lossis siab los ntawm deformation, nws tuaj yeem hnov ​​​​lub teeb liab siab, thiab tuaj yeem hloov lub teeb liab siab mus rau hauv cov khoom siv hluav taws xob muaj hluav taws xob raws li qee txoj cai. Rau kev ntsuas kom raug, tswj thiab saib xyuas, nrog rau qhov siab precision, corrosion kuj thiab compact tsim, haum rau ntau yam hnyav ib puag ncig.

MEMS siab sensors, lub npe tag nrho: Microelectro mechanical system siab sensor, integrate cutting-edge microelectronics technology thiab precision micromachining technology. Los ntawm kev sib xyaw ntawm micro-mechanical qauv thiab hluav taws xob hluav taws xob, cov nti ua los ntawm cov khoom siv semiconductor ib txwm siv xws li monocrystalline silicon wafers yog siv los ua qhov tseem ceeb los ntsuas qhov siab los ntawm kev kuaj lub cev deformation lossis kev them nqi. Nws yog tom qab ntawd hloov dua siab tshiab rau hauv hluav taws xob teeb liab rau kev ua kom paub txog kev saib xyuas zoo thiab raug hloov dua siab tshiab ntawm kev hloov siab. Nws lub ntsiab kom zoo dua yog nyob rau hauv nws miniaturization tsim, uas muab MEMS siab sensors superior kev kawm nyob rau hauv cov nqe lus ntawm qhov tseeb, loj, teb ceev thiab zog noj.

2. Cov yam ntxwv ntawm MEMS siab sensor

MEMS siab sensors tuaj yeem tsim thiab tsim siv thev naus laus zis zoo ib yam li kev sib xyaw ua ke, ua kom muaj kev ua haujlwm siab, tsis muaj nqi ntau lawm. Qhov no qhib lub qhov rooj rau cov nqi qis ntawm kev siv MEMS sensors rau cov neeg siv khoom siv hluav taws xob thiab cov txheej txheem kev lag luam tswj cov khoom, ua rau kev tswj siab yooj yim, siv tau yooj yim, thiab ntse.

Ib txwm siv tshuab siab sensors yog raws li qhov deformation ntawm hlau elastomers nyob rau hauv quab yuam, uas converts mechanical elastic deformation rau hauv hluav taws xob tso zis. Yog li, lawv tsis tuaj yeem ua me me raws li kev sib xyaw ua ke raws li MEMS siab sensors, thiab lawv cov nqi ntau dua MEMS siab sensors. Piv nrog rau cov khoom siv kho tshuab ib txwm muaj, MEMS lub siab sensors muaj qhov me me, nrog qhov siab tshaj plaws tsis pub tshaj ib centimeter. Piv nrog rau cov cuab yeej siv tshuab tsim khoom ib txwm muaj, lawv cov nqi siv tau zoo dua qub.

3. Daim ntawv thov ntawm MEMS siab sensor

Automotive kev lag luam:

Lub teb chaws tsheb yog ib qho ntawm cov kev siv tseem ceeb ntawm MEMS sensors. Hauv kev lag luam tsheb, MEMS siab sensors tau siv dav hauv kev nyab xeeb (xws li kev saib xyuas lub siab ntawm lub tshuab nres, kev tswj lub siab ntawm lub hnab ntim, thiab kev tiv thaiv kev sib tsoo), emission tswj (cav emission gas siab tswj thiab saib xyuas), kev saib xyuas log tsheb, kev tswj xyuas lub cav. , thiab ncua kev kawm ntawv vim lawv cov miniaturization, siab precision, thiab kev ntseeg tau. Cov tsheb siab kawg feem ntau muaj ntau pua lub sensors, suav nrog 30-50 MEMS sensors, ntawm 10 yog MEMS siab sensors. Cov sensors no tuaj yeem muab cov ntaub ntawv tseem ceeb los pab cov tuam txhab tsheb txhim kho kev ua haujlwm ntawm lub cav, txhim kho roj efficiency, thiab nce kev nyab xeeb ntawm kev tsav tsheb.

Consumer electronics:

Nrog rau kev txhim kho cov ntawv thov xws li 3D navigation, kev soj ntsuam kev txav, thiab kev saib xyuas kev noj qab haus huv, daim ntawv thov ntawm MEMS siab sensors hauv cov neeg siv khoom siv hluav taws xob tau dhau los ua ntau dua. Lub siab sensors hauv cov khoom siv xws li smartphones, ntsiav tshuaj, thiab smartwatches tuaj yeem siv rau kev ua haujlwm xws li barometers, altimeters, thiab sab hauv tsev navigation. Lub siab sensors hauv cov khoom siv ntse hnav kuj tuaj yeem saib xyuas kev tawm dag zog thiab kev noj qab haus huv cov cim xws li lub plawv dhia thiab kev ua si lub cev, muab cov ntaub ntawv raug dua. Tsis tas li ntawd, MEMS lub siab sensors tau siv dav hauv thaj chaw xws li drones thiab cov qauv dav hlau, muab cov ntaub ntawv qhia txog qhov siab thiab kev koom tes nrog cov txheej txheem navigation kom ua tiav kev tswj hwm dav hlau.

Kev lag luam kho mob:

Hauv kev lag luam kev kho mob, MEMS siab sensors tau siv dav hauv ntau yam khoom siv kho mob thiab kev kuaj xyuas. Lawv tuaj yeem siv rau kev kuaj ntshav siab, tswj lub tshuab ua pa thiab lub tshuab ua pa, ntsuas qhov siab sab hauv, thiab kev xa tshuaj. Cov sensors no muab kev ntsuas qhov tseeb los pab cov neeg ua haujlwm kho mob hauv kev kuaj mob thiab kev kho mob.

Industrial automation:

Hauv kev lag luam automation, MEMS siab sensors yog siv los saib xyuas thiab tswj ntau yam txheej txheem kev lag luam, thiab lawv tau siv dav hauv cov kav dej thiab cov kav dej, ntsuas qib, tswj siab, thiab ntsuas ntws. Qhov raug siab thiab kev ntseeg siab ntawm cov sensors no yog qhov tseem ceeb los xyuas kom muaj kev ruaj ntseg thiab kev nyab xeeb ntawm cov txheej txheem kev lag luam.

Aerospace:

MEMS lub siab sensors tuaj yeem siv rau kev ntsuas kev ua haujlwm aerodynamic ntawm lub dav hlau thiab foob pob hluav taws, ntsuas qhov siab siab, kev sau cov ntaub ntawv huab cua, thiab huab cua tswj cov dav hlau thiab cov khoom siv hauv chaw. Nws cov miniaturization thiab lub teeb yuag ua rau nws zoo tagnrho rau kev lag luam aerospace kom tau raws li qhov xav tau ntawm ib puag ncig.

4. Kev lag luam loj ntawm MEMS siab sensor

Tsav los ntawm kev saws me nyuam thoob plaws hauv ntau qhov kev lag luam, kev lag luam loj ntawm MEMS siab sensors loj hlob zuj zus. Yole kwv yees tias lub ntiaj teb MEMS siab sensor kev lag luam loj yuav loj hlob los ntawm US $ 1.684 billion mus rau US $ 2.215 billion hauv 2019-2026, nrog rau qhov nruab nrab txhua xyoo kev loj hlob ntawm kwv yees li 5%; Kev xa khoom tau nce los ntawm 1.485 billion units mus rau 2.183 billion units, nrog qhov nruab nrab txhua xyoo kev loj hlob ntawm 4.9%. Nrog rau qhov kev thov nce ntxiv rau qhov tseeb thiab txhim khu kev ntseeg siab kev daws teeb meem, MEMS siab sensor kev lag luam yuav tsum nthuav dav hauv xyoo tom ntej, muab ntau lub sijhawm rau cov tuam txhab thiab cov neeg muag khoom hauv daim teb no.