MEMS Pressure sensor

1. Kodi MEMS pressure sensor ndi chiyani

Pressure sensor ndi chipangizo chomwe chimagwiritsidwa ntchito m'mafakitale, nthawi zambiri chimapangidwa ndi zinthu zovutirapo (zinthu zodziwikiratu, zinthu zosasunthika) ndi magawo opangira ma siginecha, mfundo yogwira ntchito nthawi zambiri imatengera kusintha kwa zinthu zovutirapo kapena kupanikizika komwe kumachitika chifukwa cha mapindikidwe, imatha kumva chizindikiro cha kupanikizika, ndipo imatha kusinthira chizindikiro chamagetsi kukhala chizindikiro chamagetsi chomwe chilipo molingana ndi malamulo ena. Kuti muyese molondola, kuwongolera ndi kuyang'anira, ndi kulondola kwambiri, kukana kwa dzimbiri ndi kumanga kozungulira, koyenera kumadera osiyanasiyana ovuta.

Masensa amphamvu a MEMS, dzina lonse: Microelectro mechanical system pressure sensor, phatikizani luso lamakono la microelectronics ndi luso lolondola la micromachining. Kupyolera mu kuphatikizika kwa makina ang'onoang'ono ndi makina amagetsi, chip chopangidwa ndi zipangizo zamakono zopangira semiconductor monga monocrystalline silicon wafers zimagwiritsidwa ntchito ngati gawo lalikulu poyesa kupanikizika pozindikira kuwonongeka kwa thupi kapena kudzikundikira ndalama. Imasinthidwa kukhala ma siginecha amagetsi kuti igwiritsidwe ntchito kuti izindikire kuwunika tcheru ndi kutembenuka kolondola kwakusintha kwamphamvu. Ubwino wake waukulu wagona mu kapangidwe kake kakang'ono, komwe kamapatsa mphamvu zamagetsi za MEMS ntchito yabwino kwambiri potengera kulondola, kukula, liwiro la kuyankha komanso kugwiritsa ntchito mphamvu.

2. Makhalidwe a MEMS pressure sensor

Masensa amphamvu a MEMS amatha kupangidwa ndikupangidwa pogwiritsa ntchito matekinoloje ofanana ndi mabwalo ophatikizika, zomwe zimapangitsa kuti zikhale zolondola kwambiri, zotsika mtengo kwambiri. Izi zimatsegula chitseko chogwiritsa ntchito zotsika mtengo zotsika mtengo za masensa a MEMS kwa ogula zamagetsi ndi zinthu zowongolera njira zamafakitale, kupanga kuwongolera kukakamiza kosavuta, kosavuta kugwiritsa ntchito, komanso kwanzeru.

Traditional makina kuthamanga masensa zachokera mapindikidwe zitsulo elastomers pansi mphamvu, amene otembenuka mawotchi zotanuka mapindikidwe mu linanena bungwe magetsi. Chifukwa chake, sangakhale ang'onoang'ono ngati mabwalo ophatikizika ngati masensa amphamvu a MEMS, ndipo mtengo wawo ndi wokwera kwambiri kuposa masensa amphamvu a MEMS. Poyerekeza ndi masensa chikhalidwe makina, MEMS kuthamanga masensa ali ndi kukula ang'onoang'ono, ndi pazipita osapitirira centimita imodzi. Poyerekeza ndi ukadaulo wamakono wopanga makina, kuwongolera mtengo kwawo kumakhala bwino kwambiri.

3. Kugwiritsa ntchito mphamvu ya mphamvu ya MEMS

Makampani opanga magalimoto:

Munda wamagalimoto ndi imodzi mwazinthu zofunika kwambiri kumunsi kwa masensa a MEMS. M'munda wamagalimoto, masensa amphamvu a MEMS amagwiritsidwa ntchito kwambiri pamakina achitetezo (monga kuwunika kuthamanga kwa ma braking system, kuwongolera kuthamanga kwa ma airbags, ndi chitetezo kugundana), kuwongolera mpweya (kuwongolera mphamvu ya injini ndi kuwunika), kuyang'anira matayala, kasamalidwe ka injini. , ndi machitidwe oyimitsa chifukwa cha miniaturization yawo, kulondola kwambiri, ndi kudalirika. Magalimoto apamwamba nthawi zambiri amakhala ndi mazana a masensa, kuphatikiza masensa 30-50 MEMS, omwe pafupifupi 10 ndi masensa a MEMS. Masensa awa atha kupereka chidziwitso chofunikira kuti athandize opanga magalimoto kukhathamiritsa magwiridwe antchito a injini, kukonza bwino mafuta, ndikuwonjezera chitetezo chamagalimoto.

Consumer electronics:

Ndi chitukuko cha mapulogalamu monga 3D navigation, kuwunika koyenda, ndi kuyang'anira thanzi, kugwiritsa ntchito ma sensor a MEMS pamagetsi ogula kukuchulukirachulukira. Masensa akukakamiza pazida monga mafoni a m'manja, mapiritsi, ndi mawotchi anzeru amatha kugwiritsidwa ntchito ngati ma barometer, ma altimeters, ndikuyenda m'nyumba. Masensa opanikizika muzovala zanzeru amathanso kuyang'anira zolimbitsa thupi ndi zizindikiro za thanzi monga kugunda kwa mtima ndi zochitika zolimbitsa thupi, kupereka deta yolondola kwambiri. Kuphatikiza apo, masensa amphamvu a MEMS amagwiritsidwa ntchito kwambiri m'magawo monga ma drones ndi mitundu ya ndege, kupereka chidziwitso cham'mwamba komanso kugwirizana ndi machitidwe oyendetsa ndege kuti akwaniritse kuwongolera ndege.

Makampani azachipatala:

M'makampani azachipatala, masensa amphamvu a MEMS amagwiritsidwa ntchito kwambiri pazida zosiyanasiyana zamankhwala ndi machitidwe ozindikira. Atha kugwiritsidwa ntchito pozindikira kuthamanga kwa magazi, kuwongolera ma ventilator ndi opumira, kuyang'anira kuthamanga kwamkati, ndi njira zoperekera mankhwala. Masensa awa amapereka miyeso yolondola yoyezetsa kuti athandizire ogwira ntchito zachipatala kuzindikira ndi kuchiza.

Industrial automation:

M'munda wa zochita zokha mafakitale, MEMS kuthamanga masensa ntchito kuwunika ndi kulamulira njira zosiyanasiyana mafakitale, ndipo chimagwiritsidwa ntchito mu kachitidwe madzi ndi mpweya mapaipi, kuwunika mlingo, kulamulira kuthamanga, ndi otaya muyeso. Kulondola kwakukulu ndi kudalirika kwa masensawa ndizofunikira kuti zitsimikizire kukhazikika ndi chitetezo cha mafakitale.

Zamlengalenga:

Masensa amphamvu a MEMS angagwiritsidwe ntchito poyesa kuyesa kwa ndege ndi ma roketi, kuyang'anira kuthamanga kwapamwamba kwambiri, kusonkhanitsa deta ya meteorological, ndi kuwongolera kuthamanga kwa ndege ndi zida zotengera malo. Mawonekedwe ake ang'onoang'ono komanso opepuka amapangitsa kukhala koyenera kwa makampani apamlengalenga kuti akwaniritse zofunikira zachilengedwe.

4. Kukula kwa msika wa MEMS pressure sensor

Motsogozedwa ndi kukhazikitsidwa kwachulukidwe m'mafakitale osiyanasiyana, kukula kwa msika wama sensor a MEMS kukukula kwambiri. Yole akulosera kuti msika wapadziko lonse wa MEMS pressure sensor sensor msika udzakula kuchokera ku US $ 1.684 biliyoni kufika ku US $ 2.215 biliyoni mu 2019-2026, ndi chiwongoladzanja chapakati pachaka cha pafupifupi 5%; zotumizira zidakwera kuchokera ku 1.485 biliyoni mpaka mayunitsi 2.183 biliyoni, ndikukula kwapakati pachaka kwa 4.9%. Ndi kufunikira kowonjezereka kwa mayankho olondola komanso odalirika ozindikira kupanikizika, msika wa MEMS pressure sensor ikuyembekezeka kukula kwambiri m'zaka zikubwerazi, ndikupereka mwayi wambiri kwa opanga ndi ogulitsa pantchito iyi.