MEMS Pressure sensor

1. Chii chinonzi MEMS pressure sensor

Pressure sensor chishandiso chinowanzo shandiswa mukuita maindasitiri, chinowanzo umbwa nezvinhu zvinodzvanywa (elastic sensitive elements, displacement sensitive elements) uye masignal processing units, musimboti wekushanda unowanzoenderana neshanduko yezvinhu zvinonetsa kana kumanikidzwa kunokonzerwa nedeformation. inogona kunzwa chiratidzo chekumanikidza, uye inogona kushandura chiratidzo chekumanikidza kuita chinowanikwa chemagetsi chiratidzo zvinoenderana nemimwe mitemo. Kuyera kwakaringana, kudzora uye kutarisa, nehupamhi hwepamusoro, kusadzivirirwa kwecorrosion uye kuvakwa kwakaomarara, kwakakodzera kwakasiyana siyana kwakaoma.

MEMS pressure sensors, zita rakazara: Microelectro mechanical system pressure sensor, inobatanidza yekucheka-kumucheto microelectronics tekinoroji uye chaiyo micromachining tekinoroji. Kuburikidza nekubatanidzwa kweiyo micro-mechanicha chimiro uye yemagetsi dunhu, iyo chip yakagadzirwa neyechinyakare semiconductor zvinhu senge monocrystalline silicon wafers inoshandiswa sechikamu chikuru kuyera kudzvanywa nekuona kushanduka kwemuviri kana kuunganidzwa kwechaji. Inobva yashandurwa kuita masaini emagetsi ekugadzirisa kuti aone kutarisa kwakadzikama uye kutendeuka kwakaringana kwekumanikidza shanduko. Yayo musimboti mukana uri mune yayo miniaturization dhizaini, iyo inopa MEMS pressure sensors yepamusoro kuita maererano nekurongeka, saizi, kumhanya kwekupindura uye kushandiswa kwesimba.

2. Hunhu hweMEMS pressure sensor

MEMS pressure sensors inogona kugadzirwa uye kugadzirwa uchishandisa matekinoroji akafanana neakabatanidzwa maseketi, achigonesa yakakwirira-chaiyo, yakaderera-inodhura yakawanda kugadzirwa. Izvi zvinovhura musuwo wepasi-mutengo wakawanda kushandiswa kweMEMS sensors yevatengi zvemagetsi uye maindasitiri maitiro ekudzora zvigadzirwa, zvichiita kuti kudzora kudzvinyirira kuve nyore, mushandisi-ane hushamwari, uye nehungwaru.

Traditional mechanical pressure sensors yakavakirwa pa deformation yesimbi elastomers pasi pesimba, iyo inoshandura mechanical elastic deformation kuita magetsi kubuda. Naizvozvo, ivo havagone kuve madiki semasekete akabatanidzwa seMEMS kudzvanywa sensors, uye mutengo wavo wakakwira zvakanyanya kupfuura MEMS pressure sensors. Kuenzaniswa neyechinyakare mechanicha sensors, MEMS pressure sensors ine diki saizi, nehupamhi isingapfuure sendimita imwe. Kuenzaniswa neyechinyakare mechanical kugadzira tekinoroji, yavo mutengo-inoshanda inovandudzwa zvakanyanya.

3. Kushandiswa kweMEMS pressure sensor

Indasitiri yemotokari:

Munda wemotokari ndeimwe yeakakosha kudzika kwekushandisa kweMEMS sensors. Mumunda wemotokari, MEMS pressure sensors inoshandiswa zvakanyanya mukuchengetedza masisitimu (sekumanikidza kutarisa kwemabhureki masisitimu, kudzora kudzora kweairbags, uye kudhumhana kwekudzivirira), emission control (injini emission gasi kudzvanywa kwekudzora uye kutarisa), kutarisa matayi, kutonga kweinjini. , uye masisitimu ekumisikidza nekuda kweminiaturization yavo, yakanyanya kurongeka, uye kuvimbika. Mota dzepamusoro dzinowanzova nemazana emasensor, anosanganisira 30-50 MEMS sensors, ayo anenge gumi ari MEMS pressure sensors. Aya masensa anogona kupa data rakakosha kubatsira vagadziri vemota kukwidziridza kuita kweinjini, kuvandudza kushanda kwemafuta, uye kuwedzera kuchengetedza kwekutyaira.

Consumer electronics:

Nekuvandudzwa kwezvishandiso zvakaita se 3D navigation, kutarisa kwekufamba, uye kutarisa kwehutano, kushandiswa kweMEMS pressure sensors mumagetsi evatengi kuri kuwedzera kuwanda. Kudzvanya masensa mumidziyo yakadai sema smartphones, mahwendefa, uye smartwatches inogona kushandiswa kuita senge barometers, altimeters, uye indoor navigation. Iwo ma sensors ekumanikidza mumidziyo yakangwara inopfeka anogona zvakare kutarisa maekisesaizi uye zviratidzo zvehutano senge kurova kwemoyo uye chiitiko chemuviri, ichipa data rakawanda. Pamusoro pezvo, MEMS pressure sensors inoshandiswa zvakanyanya muminda senge drones nemhando dzendege, ichipa ruzivo rwekukwira uye kushandirapamwe nemafambisirwo emafambisirwo ekuita kunyatsoita kudzora ndege.

Indasitiri yezvokurapa:

Muindasitiri yezvokurapa, MEMS pressure sensors inoshandiswa zvakanyanya mumidziyo yakasiyana-siyana yekurapa uye masisitimu ekuona. Iwo anogona kushandiswa kuona kudzvanywa kweropa, kutonga kweventilator uye kufema, yemukati kudzvanywa kwekutarisa, uye masisitimu ekutumira zvinodhaka. Aya ma sensors anopa zviyero zvakaringana zvekumanikidza kubatsira vashandi vekurapa mukuongororwa uye kurapwa.

Industrial otomatiki:

Mumunda weindasitiri otomatiki, MEMS kudzvanywa ma sensors anoshandiswa kutarisa uye kudzora akasiyana maindasitiri maitiro, uye anoshandiswa zvakanyanya mumvura uye gasi pombi masisitimu, kutarisisa nhanho, kudzora kudzvinyirira, uye kuyerwa kwekuyerera. Iko kurongeka kwepamusoro uye kuvimbika kweaya masensa kwakakosha kuve nechokwadi kugadzikana uye kuchengetedzeka kwemaindasitiri maitiro.

Aerospace:

MEMS pressure sensors inogona kushandiswa kuaerodynamic performance test yendege nemaroketi, high-altitude pressure monitoring, meteorological data collection, and air pressure control of aircraft and space-based equipment. Its miniaturization uye lightweight maitiro anoita kuti ive yakanaka kune indasitiri yezvemuchadenga kuti isangane nezvinodiwa kwezvakatipoteredza.

4. Musika wemusika weMEMS pressure sensor

Inotungamirwa nekugamuchirwa kwakapararira mumaindasitiri akasiyana, saizi yemusika yeMEMS kumanikidza sensors iri kukura zvakanyanya. Yole anofanotaura kuti yepasi rose MEMS pressure sensor musika saizi ichakura kubva kuUS $ 1.684 bhiriyoni kusvika kuUS $ 2.215 bhiriyoni muna 2019-2026, neavhareji pagore mukomboni kukura mwero weanosvika 5%; kutakura kwakawedzera kubva 1.485 bhiriyoni mayunitsi kusvika 2.183 bhiriyoni mayuniti, ine avhareji yegore yekukura kwekukura kwe4.9%. Nekuwedzera kuri kuita kwechokwadi uye kwakavimbika kumanikidza kunzwa mhinduro, iyo MEMS pressure sensor musika inotarisirwa kuwedzera zvakanyanya mumakore anouya, ichipa mikana yakawanda yevagadziri nevatengesi mumunda uyu.