MEMS khatello ea maikutlo

1. Sensor ea khatello ea MEMS ke eng

Sensor ea khatello ke sesebelisoa se atisang ho sebelisoa ts'ebetsong ea indasteri, hangata se entsoe ka lintho tse nang le khatello ea maikutlo (lisebelisoa tse bobebe tsa elasticity, likarolo tse hlokolosi tsa ho falla) le likarolo tsa ts'ebetso ea matšoao, molao-motheo oa ts'ebetso hangata o ipapisitse le phetoho ea thepa e utloang khatello kapa khatello e bakoang ke deformation, e khona ho utloa lets'oao la khatello, 'me e ka fetola lets'oao la khatello hore e be lets'oao la motlakase le fumanehang ho latela melao e itseng. Bakeng sa tekanyo e nepahetseng, taolo le tlhokomelo, ka ho nepahala ho phahameng, ho hanyetsa kutu le kaho e kopanetsoeng, e loketseng mefuta e sa tšoaneng ea maemo a thata.

Li-sensor tsa khatello ea MEMS, lebitso le felletseng: Sensor ea khatello ea mochini oa Microelectro, e kopanya theknoloji ea morao-rao ea li-microelectronics le theknoloji e nepahetseng ea micromachining. Ka motsoako oa sebopeho sa micro-mechanical le potoloho ea elektroniki, chip e entsoeng ka thepa ea setso ea semiconductor e kang monocrystalline silicon wafers e sebelisoa e le karolo e ka sehloohong ea ho lekanya khatello ka ho lemoha ho senyeha ha 'mele kapa ho bokella chelete. E ntan'o fetoloa mats'oao a motlakase bakeng sa ts'ebetso ho hlokomela tlhokomelo e hlokolosi le phetoho e nepahetseng ea liphetoho tsa khatello. Molemo oa eona o ka sehloohong o itšetlehile ka moralo oa eona oa miniaturization, o fanang ka lisebelisoa tsa khatello ea MEMS ts'ebetso e phahameng ho latela ho nepahala, boholo, lebelo la karabo le tšebeliso ea matla.

2. Litšobotsi tsa MEMS khatello ea maikutlo

Li-sensor tsa khatello ea MEMS li ka etsoa le ho etsoa ho sebelisoa theknoloji e ts'oanang le lipotoloho tse kopantsoeng, tse nolofalletsang tlhahiso ea boima bo phahameng, e theko e tlaase. Sena se bula monyetla oa ho sebelisa li-sensor tsa MEMS tse theko e tlase bakeng sa lisebelisoa tsa elektronike tsa bareki le lihlahisoa tsa taolo ea ts'ebetso ea indasteri, ho etsa hore taolo ea khatello e be bonolo, e sebelise habonolo ebile e bohlale.

Li-sensor tsa khale tsa khatello ea mochini li ipapisitse le deformation ea li-elastomers tsa tšepe tse tlas'a matla, tse fetolang deformation ea mechanical elastic hore e be tlhahiso ea motlakase. Ka hona, li ke ke tsa e-ba tse nyenyane joaloka li-circuits tse kopantsoeng joaloka li-sensor tsa khatello ea MEMS, 'me litšenyehelo tsa tsona li phahame haholo ho feta li-sensors tsa khatello ea MEMS. Ha ho bapisoa le li-sensor tse tloaelehileng tsa mochini, li-sensor tsa khatello ea MEMS li na le boholo bo nyane, 'me boholo bo sa feteng centimeter e le' ngoe. Ha ho bapisoa le theknoloji e tloaelehileng ea tlhahiso ea mechine, ts'ebetso ea bona ea litšenyehelo e ntlafatsoa haholo.

3. Ts'ebeliso ea sensor ea khatello ea MEMS

Indasteri ea likoloi:

Sebaka sa likoloi ke e 'ngoe ea lits'ebetso tsa bohlokoa tse tlase tsa li-sensor tsa MEMS. Lebaleng la likoloi, li-sensor tsa khatello ea MEMS li sebelisoa haholo lits'ebetsong tsa polokeho (joalo ka ho lekola khatello ea li-braking system, taolo ea khatello ea mekotla ea moea, le ts'ireletso ea ho thulana), taolo ea tlhahiso (taolo ea khatello ea khase ea enjene le ho beha leihlo), ho lekola thaere, taolo ea enjene. , le litsamaiso tse emisitsoeng ka lebaka la miniaturization ea tsona, ho nepahala ho phahameng, le ho ts'epahala. Likoloi tse phahameng hangata li na le li-sensor tse makholo, ho kenyelletsa le li-sensor tsa 30-50 MEMS, tseo tse ka bang 10 e leng li-sensor tsa khatello ea MEMS. Li-sensor tsena li ka fana ka lintlha tsa bohlokoa ho thusa baetsi ba likoloi ho ntlafatsa ts'ebetso ea enjene, ho ntlafatsa ts'ebetso ea mafura le ho eketsa polokeho ea likoloi.

Consumer electronics:

Ka nts'etsopele ea lits'ebetso tse joalo ka 3D navigation, ho lekola motsamao, le tlhokomelo ea bophelo bo botle, ts'ebeliso ea li-sensor tsa khatello ea MEMS ho lisebelisoa tsa elektroniki tsa bareki e ntse e ata. Li-sensor tsa khatello ea lisebelisoa tse kang li-smartphones, matlapa le li-smartwatches li ka sebelisoa bakeng sa mesebetsi e kang barometers, altimeters le navigation ea kahare. Li-sensor tsa khatello ea lisebelisoa tse apereng tse bohlale li ka boela tsa beha leihlo matšoao a boikoetliso le bophelo bo botle joalo ka lebelo la pelo le boikoetliso ba 'mele, ho fana ka lintlha tse nepahetseng haholoanyane. Ho phaella moo, li-sensor tsa khatello ea MEMS li sebelisoa haholo libakeng tse kang li-drones le mehlala ea lifofane, ho fana ka tlhahisoleseding ea bophahamo le ho sebelisana le mekhoa ea ho tsamaisa lifofane ho finyella taolo e nepahetseng ea sefofaneng.

Indasteri ea bongaka:

Lefapheng la bongaka, li-sensor tsa khatello ea MEMS li sebelisoa haholo lisebelisoa tse fapaneng tsa bongaka le lits'ebetso tsa ho lemoha. Li ka sebelisoa bakeng sa ho lemoha khatello ea mali, taolo ea li-ventilator le li-respirators, ho hlahloba khatello ea ka hare, le mekhoa ea ho tsamaisa lithethefatsi. Li-sensor tsena li fana ka litekanyo tse nepahetseng tsa khatello ho thusa basebeletsi ba tsa bongaka ho fumana tlhahlobo le kalafo.

Boiketsetso ba indasteri:

Lefapheng la li-automation tsa indasteri, li-sensor tsa khatello ea MEMS li sebelisoa ho lekola le ho laola lits'ebetso tse fapaneng tsa indasteri, 'me li sebelisoa haholo lits'ebetsong tsa liphaephe tsa metsi le khase, ho lekola boemo, taolo ea khatello le tekanyo ea phallo. Ho nepahala ho phahameng le ho ts'epahala ha li-sensor tsena ke tsa bohlokoa ho netefatsa botsitso le polokeho ea lits'ebetso tsa indasteri.

Sepakapaka:

Li-sensor tsa khatello ea MEMS li ka sebelisoa bakeng sa tlhahlobo ea ts'ebetso ea aerodynamic ea lifofane le lirokete, ho shebella khatello e phahameng ea bophahamo, pokello ea lintlha tsa boemo ba leholimo, le taolo ea khatello ea moea ea lifofane le lisebelisoa tse thehiloeng sebakeng. Litšobotsi tsa eona tsa miniaturization le tse bobebe li etsa hore e be sebaka se loketseng indastering ea lifofane ho fihlela litlhoko tse batloang ke tikoloho.

4. Boholo ba 'maraka oa sensor ea khatello ea MEMS

E tsamaisoa ke kamohelo e atileng ea liindasteri tse fapaneng, boholo ba mmaraka ba li-sensor tsa khatello ea MEMS bo ntse bo hola haholo. Yole o bolela esale pele hore boholo ba 'maraka oa MEMS oa khatello ea maikutlo o tla hōla ho tloha ho US $ 1.684 limilione tse likete ho ea ho US $ 2.215 limilione tse likete ho 2019-2026, ka karolelano ea selemo le selemo sekhahla sa kholo ea hoo e ka bang 5%; thomello e eketsehile ho tloha ho li-unit tsa limilione tse likete tsa 1.485 ho ea ho li-unit tsa 2.183 limilione tse likete, ka karolelano ea selemo le selemo ea kholo ea kholo ea 4.9%. Ka tlhokahalo e ntseng e eketseha ea tharollo e nepahetseng le e ka tšeptjoang ea ho lemoha khatello, 'maraka oa MEMS oa khatello ea maikutlo o lebelletsoe ho hola haholo lilemong tse tlang, ho fana ka menyetla e mengata bakeng sa bahlahisi le bafani ba thepa tšimong ena.