Inzwa yoxinzelelo lwe-MEMS

1. Yintoni i-MEMS yoxinzelelo lwenzwa

Isivamvo soxinzelelo sisixhobo esiqhele ukusetyenziswa kwimizi-mveliso, edla ngokuqulunqwa ngezinto ezinovakalelo zoxinzelelo (izinto ezinobuntununtunu ezinwebekayo, izinto ezinobuntununtunu) kunye neeyunithi zokusetyenzwa komqondiso, umgaqo wokusebenza udla ngokusekwe kutshintsho lwezixhobo ezibuthathaka zoxinzelelo okanye uxinzelelo olubangelwa yi-deformation. Iyakwazi ukuva umqondiso woxinzelelo, kwaye inokuguqula umqondiso woxinzelelo ube ngumqondiso okhoyo ophumayo wombane ngokwemithetho ethile. Ukulinganisa ngokuchanekileyo, ukulawula kunye nokubeka iliso, ngokuchaneka okuphezulu, ukuchasana kwe-corrosion kunye nokwakhiwa kwe-compact, efanelekileyo kwiindawo ezahlukeneyo ezinzima.

Iinzwa zoxinzelelo ze-MEMS, igama elipheleleyo: Inzwa yoxinzelelo lwenkqubo ye-Microelectro, idibanisa itekhnoloji ye-microelectronics yokusika kunye netekhnoloji echanekileyo ye-micromachining. Ngokudityaniswa kwesakhiwo se-micro-mechanical kunye ne-electronic circuit, i-chip eyenziwe ngezinto eziqhelekileyo ze-semiconductor ezifana ne-monocrystalline silicon wafers isetyenziswa njengeyona nxalenye iphambili yokulinganisa uxinzelelo ngokufumanisa ukuguqulwa komzimba okanye ukuqokelelwa kwentlawulo. Ithi ke iguqulwe ibe ziimpawu zombane ukuze kuqwalaselwe ukujongwa okubuthathaka kunye noguqulo oluchanekileyo lotshintsho loxinzelelo. Inzuzo yayo engundoqo ilele kwi-design yayo ye-miniaturization, enika i-MEMS i-sensor ye-pressure sensors ukusebenza okuphezulu ngokuchaneka, ubukhulu, isantya sokuphendula kunye nokusetyenziswa kwamandla.

2. Iimpawu ze-MEMS zoxinzelelo lwenzwa

Iinzwa zoxinzelelo ze-MEMS zinokuqulunqwa kwaye zenziwe kusetyenziswa ubuchwepheshe obufana neesekethe ezidibeneyo, ezivumela ukuchaneka okuphezulu, ukuveliswa kobunzima obuphantsi. Oku kuvula umnyango wokusetyenziswa kwexabiso eliphantsi le-MEMS ye-sensors ze-electronics zabathengi kunye neemveliso zolawulo lwenkqubo yoshishino, ukwenza ulawulo loxinzelelo lube lula, lusebenziseka lula, kwaye lunengqondo.

Abenzi boxinzelelo bemveli bomatshini basekwe kwi-deformation ye-elastomers zetsimbi phantsi kwamandla, okuguqula i-mechanical elastic deformation ibe yimveliso yombane. Ngoko ke, abanako ukuba bancinci njengeesekethe ezidibeneyo njenge-MEMS i-sensor sensors, kwaye iindleko zabo ziphezulu kakhulu kune-MEMS zoxinzelelo. Xa kuthelekiswa nezinzwa zoomatshini bemveli, i-MEMS i-sensor sensors inobungakanani obuncinci, kunye nobuninzi obungadluli kwi-centimeter enye. Xa kuthelekiswa nobugcisa bokuvelisa oomatshini bemveli, ukusebenza kwabo kweendleko kuphuculwe kakhulu.

3. Ukusetyenziswa kwe-MEMS yoxinzelelo lwenzwa

Ushishino lweemoto:

Intsimi yeemoto yenye yezicelo ezibalulekileyo ezisezantsi ze-MEMS sensors. Kwintsimi yeemoto, ii-sensors zoxinzelelo ze-MEMS zisetyenziswa ngokubanzi kwiinkqubo zokhuseleko (ezifana nokubeka iliso loxinzelelo lweenkqubo ze-braking, ulawulo loxinzelelo lwe-airbags, kunye nokukhusela ukungqubana), ukulawula ukukhutshwa (i-injini emission emission control control and monitoring), ukubeka iliso kwitayara, ulawulo lweenjini. , kunye neenkqubo zokunqunyanyiswa ngenxa ye-miniaturization yazo, ukuchaneka okuphezulu, kunye nokuthembeka. Iimoto eziphezulu zivame ukuba namakhulu eenzwa, kuquka i-30-50 ye-MEMS sensors, apho malunga ne-10 yi-MEMS yoxinzelelo. Ezi zinzwa zinokubonelela ngedatha ebalulekileyo ukunceda abavelisi beemoto baphucule ukusebenza kwe-injini, ukuphucula ukusebenza kakuhle kwamafutha, kunye nokunyusa ukhuseleko lokuqhuba.

Consumer electronics:

Ngokuphuhliswa kwezicelo ezifana ne-3D navigation, ukubeka iliso kwintshukumo, kunye nokubeka iliso kwimpilo, ukusetyenziswa kwe-MEMS i-sensor sensors kwi-electronics yabathengi iya ixhaphake. Izinzwa zoxinzelelo kwizixhobo ezinje ngee-smartphones, iitafile, kunye nee-smartwatches zinokusetyenziselwa imisebenzi enje ngee-barometers, iialtimeters, kunye nokuhamba kwangaphakathi. Iinzwa zoxinzelelo kwizixhobo ezinxitywayo ezihlakaniphile zinokuphinda zibeke iliso lokuzilolonga kunye nezikhombisi zezempilo ezifana nesantya sentliziyo kunye nomsebenzi womzimba, ukubonelela ngedatha echanekileyo. Ukongezelela, i-MEMS i-sensors zoxinzelelo zisetyenziswa ngokubanzi kwiinkalo ezifana ne-drones kunye neemodeli zeenqwelo-moya, ukubonelela ngolwazi oluphezulu kunye nokusebenzisana neenkqubo zokuhamba ukuze kufezekiswe ulawulo lwendiza oluchanekileyo.

Ishishini lezonyango:

Kwishishini lezonyango, iinzwa zoxinzelelo ze-MEMS zisetyenziswa ngokubanzi kwizixhobo ezahlukeneyo zonyango kunye neenkqubo zokubona. Zingasetyenziselwa ukukhangela uxinzelelo lwegazi, ulawulo lwee-ventilators kunye ne-respirators, ukujonga uxinzelelo lwangaphakathi, kunye neenkqubo zokuhanjiswa kweziyobisi. Ezi zinzwa zibonelela ngemilinganiselo yoxinzelelo oluchanekileyo ukunceda abasebenzi bezonyango ekuxilongweni nasekunyangweni.

Ishishini elizenzekelayo:

Kwintsimi ye-automation ye-industrial, i-MEMS i-sensors zoxinzelelo zisetyenziselwa ukubeka iliso kunye nokulawula iinkqubo ezahlukeneyo zoshishino, kwaye zisetyenziswa ngokubanzi kwiinkqubo zemibhobho yamanzi kunye negesi, ukubeka iliso kwinqanaba, ukulawula uxinzelelo kunye nokulinganisa ukuhamba. Ukuchaneka okuphezulu kunye nokuthembeka kwezi nzwa kubalulekile ukuqinisekisa ukuzinza kunye nokhuseleko lweenkqubo zoshishino.

I-Aerospace:

Iinzwa zoxinzelelo ze-MEMS zingasetyenziselwa ukuvavanya ukusebenza kwe-aerodynamic yeenqwelo-moya kunye neerokethi, ukubeka iliso koxinzelelo oluphezulu, ukuqokelela idatha yemeteorological, kunye nokulawulwa koxinzelelo lomoya lweenqwelo-moya kunye nezixhobo ezisekelwe kwindawo. I-miniaturization yayo kunye neempawu ezikhaphukhaphu zenza ukuba ilungele ishishini le-aerospace ukuhlangabezana neemfuno ezifunekayo zokusingqongileyo.

4. Ubungakanani bemarike ye-MEMS yoxinzelelo lwenzwa

Iqhutywa kukwamkelwa okuxhaphakileyo kumashishini ahlukeneyo, ubungakanani bentengiso yeenzwa zoxinzelelo lwe-MEMS bukhula kakhulu. UYole uqikelela ukuba ubungakanani bemarike ye-MEMS yoxinzelelo lwengqondo iya kukhula ukusuka kwi-US$1.684 yebhiliyoni ukuya kwi-2.215 yeebhiliyoni zeedola ngo-2019-2026, kunye nesantya sokukhula komndilili wonyaka malunga ne-5%; Ukuthunyelwa kwempahla kunyuke ukusuka kwi-1.485 yeebhiliyoni zeeyunithi ukuya kwi-2.183 yeebhiliyoni zeeyunithi, kunye ne-avareji yokukhula komndilili wonyaka we-4.9%. Ngokunyuka kwemfuno yezisombululo ezichanekileyo nezithembekileyo zokuva uxinzelelo, imarike ye-MEMS yoxinzelelo lwengqondo kulindeleke ukuba yande kakhulu kwiminyaka ezayo, ibonelela ngamathuba amaninzi kubavelisi kunye nababoneleli kule ndawo.